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SiC功率器件制造裝備技術及發展趨勢Technology and development trends of SiC power devices manufacturing equipment鞏小亮中國電子科技集團公司第四十八研究所、半導體裝備研究部主任Xiaoliang GONGDirector of Semiconductor equipment research department, The 48th Research Institute of China Electronics Technology Group Corporation

SiC功率器件制造工藝特點與核心裝備創新進展Manufacturing process characteristics and key equipment development of SiC power devices鞏小亮中國電子科技集團公司第四十八研究所 半導體裝備研究部副主任GONGXiaoliang Deputy director of Semiconductor equipment research department, the 48th Research Institute of China Electronics Technology Group Corporation